The Lattice Mismatch Problem and Its Consequences
GaN-on-Si power devices represent a fundamental engineering compromise: they exploit the superior electron mobility and breakdown field of gallium nitride while leveraging the cost, thermal conductivity, and manufacturing infrastructure of silicon substrates. However, this marriage creates immediate crystallographic strain. GaN has a hexagonal wurtzite structure with a lattice constant of approximately 3.19 Ć , while silicon is cubic with a lattice constant of 5.43 Ć . This ~17% lattice mismatch forces the GaN layer to grow under compressive stress, creating a foundation of point defects, threading dislocations, and strain-induced defect clusters that propagate upward through the device stack.
The AlGaN barrier layer, typically 20ā30 nm thick and containing 15ā25% aluminum, sits atop the GaN channel. This aluminum incorporation widens the bandgap locally and induces spontaneous and piezoelectric polarization that creates the two-dimensional electron gas (2DEG)āthe conduction channel. However, the AlGaN/GaN interface itself is where gate-stack physics becomes critical. Unlike silicon MOS devices, where the Si/SiOā interface is relatively well-understood and can be passivated to achieve interface-state densities below 10¹Ⱐcmā»Ā² eVā»Ā¹, the AlGaN/GaN interface exhibits inherent defect densities in the range of 10¹² to 10¹³ cmā»Ā² eVā»Ā¹.
Interface States and the Density-of-States Spectrum
Interface traps at the AlGaN/GaN boundary arise from several mechanisms. First, the dangling bonds of aluminum and gallium atoms at the truncated interface create localized electronic states within the bandgap. Second, the large lattice mismatch generates misfit dislocationsāarrays of defects that accommodate strain by creating additional trap sites. Third, oxygen incorporation during oxidation or air exposure of the AlGaN surface creates oxygen-related defects that extend into the interface region.
These interface states occupy energy levels distributed throughout the bandgap, typically with peak densities near the conduction-band edge and in mid-gap regions. The distribution is not uniform: interface-state density peaks near 0.3ā0.5 eV below the conduction band, corresponding to defect types such as Ga-dangling bonds and complex defect centers. This non-uniform distribution is critical because it determines which traps will be preferentially filled during gate-voltage stress. When the gate voltage is positive (accumulation), electrons are driven toward the AlGaN/GaN interface, and traps near the conduction-band edge fill first. When negative (depletion), deeper traps become accessible.
Gate-Dielectric Integration and Oxide Quality
Modern GaN-on-Si devices employ either native Schottky gates or insulated-gate structures using deposited dielectricsātypically SiOā, AlāOā, or hybrid stacks. The quality of this dielectric layer and its interface with AlGaN is paramount. Atomic-layer deposition (ALD) of AlāOā has become industry standard because it provides superior conformality and fewer pinholes than sputtered oxides. However, even ALD-grown AlāOā exhibits fixed oxide charge (typically 10¹¹ to 10¹² cmā»Ā²) and oxide-trap densities of 10¹ⷠto 10¹⸠cmā»Ā³ within the dielectric volume.
The oxide/AlGaN interface introduces yet another layer of complexity. Pre-deposition surface preparationāplasma cleaning, chemical etching, or thermal oxidationādramatically affects the resulting interface quality. A native oxide layer often forms before dielectric deposition, and this oxide can either passivate the AlGaN surface or introduce additional defects depending on its composition and thickness. Real devices exhibit oxide/AlGaN interface-state densities ranging from 10¹¹ to 10¹² cmā»Ā² eVā»Ā¹, roughly one to two orders of magnitude better than bare AlGaN but still significantly worse than Si/SiOā.
Polarization Effects and Band Bending
The spontaneous and piezoelectric polarization in the AlGaN layer creates a built-in electric field that bends the GaN conduction band, forming the 2DEG. This polarization-induced charge is fixed and does not respond to gate-voltage transients. However, it establishes the baseline band structure upon which gate-voltage modulation occurs. When gate voltage is applied, the electric field in the gate dielectric modulates the band bending at the AlGaN/GaN interface, changing the 2DEG density and thus the device's on-resistance. Critically, this modulation is only as fast as the dielectric can respondāif charge is trapped in interface or oxide states, the effective capacitance decreases, and the band-bending response lags behind the applied voltage. In MHz-frequency switching, this lag translates directly into dynamic on-resistance increase because the 2DEG cannot fully respond to the gate-voltage command within the switching period.